JPH0241252U - - Google Patents

Info

Publication number
JPH0241252U
JPH0241252U JP12011888U JP12011888U JPH0241252U JP H0241252 U JPH0241252 U JP H0241252U JP 12011888 U JP12011888 U JP 12011888U JP 12011888 U JP12011888 U JP 12011888U JP H0241252 U JPH0241252 U JP H0241252U
Authority
JP
Japan
Prior art keywords
axis direction
fixing frame
mask
mask fixing
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12011888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12011888U priority Critical patent/JPH0241252U/ja
Publication of JPH0241252U publication Critical patent/JPH0241252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12011888U 1988-09-13 1988-09-13 Pending JPH0241252U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12011888U JPH0241252U (en]) 1988-09-13 1988-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12011888U JPH0241252U (en]) 1988-09-13 1988-09-13

Publications (1)

Publication Number Publication Date
JPH0241252U true JPH0241252U (en]) 1990-03-22

Family

ID=31365941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12011888U Pending JPH0241252U (en]) 1988-09-13 1988-09-13

Country Status (1)

Country Link
JP (1) JPH0241252U (en])

Similar Documents

Publication Publication Date Title
JPH0241252U (en])
JPS6214727U (en])
JPS6213051Y2 (en])
JPS63115213U (en])
JPH034022Y2 (en])
JPH02131334U (en])
JPS61192445U (en])
JPH0373428U (en])
JPH0581841U (ja) スリット走査型投影露光装置
JPS622250U (en])
JPS61145938U (en])
JPS6438595U (en])
JPH01160828U (en])
JPS6249232U (en])
JPH0470732U (en])
JPH03177854A (ja) 複写機の光学装置
JPS62104440U (en])
JPS63188938U (en])
JPH0314454U (en])
JPH02141840U (en])
JPS5893939U (ja) 可変倍率型複写機の露光光学装置
JPH0418312U (en])
JPS6322730U (en])
JPS606223U (ja) フオトマスク検査機
JPH01125547U (en])